@conference{839971,
  author = {D Casa and R Jones and Theodore Vorburger and Ndubuisi Orji and G Barclay and P Bolton and W Wu and E Lin and T Hu},
  title = {Subnanometer Wavelength Metrology of Lithographically Prepared structures: A Comparison of Neutron and X-Ray Scattering},
  year = {2003},
  number = {5038},
  month = {2003-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA},
  language = {en},
}