@article{839926,
  author = {B Yeung and Alan Lytle and V Sarihan and David Read and Y Guo},
  title = {Applying a Methodology for Microtensile Analysis of Thin Films},
  year = {2002},
  number = {45},
  month = {2002-06-01 00:06:00},
  publisher = {Solid State Technology},
  language = {en},
}