@misc{839711,
  author = {Clare Allocca and Stephen Freiman},
  title = {Nanometrology - FY 2003 Program and Selected Accomplishments},
  year = {2003},
  month = {2003-12-15 00:12:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}