@article{839541,
  author = {C King and H Pois and S Zangooie and R Young and Joseph Woicik and J Gupta},
  title = {Advanced Optical Techniques for the Determination of Composition and Thickness of Strained SiGe Alloys for a Manufacturing Environment},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Applied Physics Letters},
  language = {en},
}