@article{839451,
  author = {U Beck and Douglas Smith and G Reiners and S Dapkunas},
  title = {Mechanical Properties of Si<sub>02</sub> and Si<sub>3</sub>N<sub>4</sub> Coatings: A BAM/NIST Cooperative Project},
  year = {1998},
  number = {332},
  month = {1998-09-24 00:09:00},
  publisher = {Thin Solid Films},
  language = {en},
}