@conference{839261,
  author = {M Sahiner and S Novak and Joseph Woicik and J Liu and V Krishnamoorty},
  title = {Arsenic Clustering and Precipitation Analysis in Ion-Implanted Si Wafers by X-Ray Absorption Spectroscopy and SIMS},
  year = {2000},
  number = {2000},
  month = {2000-09-01 00:09:00},
  publisher = {Ion Implementation Technology, International Conference | 13th | | IEEE, Alpbach, 1, AU},
  language = {en},
}