@article{839256,
  author = {Patrick Lysaght and Joseph Woicik and Daniel Fischer and Gennadi Bersuker and Joel Barnett and Brendan Foran and Hsing-Huang Tseng and Raj Jammy},
  title = {Chemical Analysis of HfO<sub>2</sub>/ Si (100) Film Systems Exposed to NH<sub>3</sub> Thermal Processing},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Journal of Applied Physics},
  language = {en},
}