@conference{8391,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology?},
  year = {2014},
  number = {9236},
  month = {2014-10-23},
  publisher = {Proc. SPIE Scanning Microscopies, Monterey, CA},
  doi = {https://doi.org/10.1117/12.2069324},
  language = {en},
}