@article{838971,
  author = {D Goldfarb and M Angelopoulos and Eric Lin and Ronald Jones and Christopher Soles and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Wen-Li Wu},
  title = {Confinement Effects on the Spatial Extent of the Reaction Front in Ultrathin Chemically Amplified Photoresists},
  year = {2001},
  number = {19},
  month = {2001-12-01 00:12:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851937},
  language = {en},
}