@article{838866, author = {M Erdtmann and M Currie and Joseph Woicik and David Black}, title = {Superior Large-Scale Relaxation and Defectivity in SiGe Layers Grown on Pre-Threaded Si Substrates}, year = {2021}, month = {2021-10-12 15:10:19}, publisher = {Journal of Applied Physics}, language = {en}, }