@article{article,
  author = {R Vogelgesang and M Grimsditch and Jay Wallace},
  title = {Polarized Ultraviolet Raman Spectroscopy of \&$\#$914;-Si<sub>3</sub>N<sub>4</sub>},
  year = {2002},
  number = {92},
  month = {2002-09-01 00:09:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}