@article{838456, author = {U Paik and J Kim and Y Yung and T Katoh and Jinkyoo Park and Vincent Hackley}, title = {The Effect of Si Dissolution on the Stability of Silica Particles and its Influence on Chemical Mechanical Polishing for Interlayer Dielectrics}, year = {2001}, number = {39}, month = {2001-12-01 00:12:00}, publisher = {Journal of the Korean Physical Society}, language = {en}, }