@article{838351,
  author = {V. Lee and Christopher Soles and D Liu and Barry Bauer and Wen-Li Wu},
  title = {X-Ray Reflectivity as a Metrology to Characterize Pore Size Distributions in Low-K Dielectric Films},
  year = {2002},
  number = {87},
  month = {2002-08-01 00:08:00},
  publisher = {Polymer Preprints},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852038},
  language = {en},
}