@article{838341,
  author = {M Lisiansky and A Heiman and M Kovler and Y Roizin and Igor Levin and A Gladkikh and M Oksman and R Edrei and A Hofman and Y Shnieder and T Claasen},
  title = {SiO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub>/A1<sub>2</sub>O<sub>3</sub> Stacks on Silicon for Scaled-Down Memory Devices: Effects of Interfaces and Thermal Annealing},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Applied Physics Letters},
  language = {en},
}