@conference{838091,
  author = {Patrick Lysaght and Joseph Woicik and Brendan Foran and Joel Barnett and Gennadi Bersuker and B Lee},
  title = {The Influence of NH<sub>3</sub> Anneal on the Crystallization Kinetics of HfO<sub>2</sub> Gate Dielectric Films},
  year = {2006},
  month = {2006-11-17 00:11:00},
  publisher = {ECS Conference | 208th | 2006 |, Undefined},
  language = {en},
}