@conference{838086,
  author = {Ronald Jones and T Hu and Eric Lin and Wen-Li Wu and D Casa and Ndubuisi Orji and Theodore Vorburger and P Bolton and Z Barclay},
  title = {Sub-Nanometer Wavelength Metrology of Lithographically Prepared Structures: A Comparison of Neutron and X-Ray Scattering},
  year = {2003},
  number = {5038},
  month = {2003-06-01 00:06:00},
  publisher = {Metrology, Inspection and Process Control for Microlithography | 17th | Metrology, Inspection and Process Control for Microlithography XVII | SPIE, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852192},
  language = {en},
}