@article{837921,
  author = {Ronald Jones and C Willson and T Hu and Eric Lin and Wen-Li Wu and D Goldfarb and M Angelopoulos and B Trinque and G Schmidt and M Stewart},
  title = {Formation of Deprotected Fuzzy Blobs in Chemically Amplified Resists},
  year = {2004},
  number = {42},
  month = {2004-09-01 00:09:00},
  publisher = {Journal of Polymer Science Part B-Polymer Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852245},
  language = {en},
}