@conference{837871,
  author = {Kristopher Lavery and George Thompson and Hai Deng and D Fryer and Kwang-Woo Choi and B Vogt and Vivek Prabhu and Eric Lin and Wen-Li Wu and Sushil Satija and Michael Leeson and Heidi Cao},
  title = {Fundamentals of the Reaction-Diffusion Process in Model EUV Photoresists},
  year = {2006},
  number = {6153},
  month = {2006-03-01 00:03:00},
  publisher = {Proceedings of SPIE, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852624},
  language = {en},
}