@article{837676,
  author = {Daniel Josell and Daniel Wheeler and W Huber and John Bonevich and Thomas Moffat},
  title = {A Simple Equation for Predicting Superconformal Electrodeposition in Submicrometer Trenches},
  year = {2001},
  number = {148},
  month = {2001-11-02 00:11:00},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853067},
  language = {en},
}