@misc{837611,
  author = {Barry Bauer and V. Lee and R Hedden and Christopher Soles and D Liu and Wen-Li Wu},
  title = {SANS Characterization of Nanoporous Thin Films for the Next Generation of Integrated Circuits},
  year = {2002},
  number = {35(13)},
  month = {2002-07-01 00:07:00},
  publisher = {Electronic Publication},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852061},
  language = {en},
}