@conference{837511,
  author = {E Jablonski and Vivek Prabhu and S Sambasivan and Daniel Fischer and Eric Lin and D Goldfarb and M Angelopolous and H Ito},
  title = {Surface and Bulk Chemistry of Chemically Amplified Photoresists: Segregation in Thin Films and Environmental Stability Issues},
  year = {2004},
  number = {5376},
  month = {2004-09-01 00:09:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852294},
  language = {en},
}