@article{837491,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Daniel Fischer and S Sambasivan and Eric Lin and Ronald Jones and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {X-ray Absorption Spectroscopy to Probe Surface Composition and Surface Deprotection in Photoresist Films},
  year = {2005},
  number = {21 No. 9},
  month = {2005-03-01 00:03:00},
  publisher = {Langmuir},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852399},
  language = {en},
}