@article{837446,
  author = {Vivek Prabhu and Ronald Jones and Eric Lin and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Reaction Front Induced Roughness in Chemically Amplified Photoresists},
  year = {2002},
  number = {87},
  month = {2002-08-01 00:08:00},
  publisher = {Polymeric Materials: Science & Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852008},
  language = {en},
}