@article{837321,
  author = {Daniel Josell and Daniel Wheeler and Thomas Moffat},
  title = {Superconformal Deposition by Surfactant-Catalyzed Chemical Vapor Deposition},
  year = {2002},
  number = {5},
  month = {2002-01-24 00:01:00},
  publisher = {Electrochemical and Solid State Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853112},
  language = {en},
}