@article{837301,
  author = {B Vogt and D Goldfarb and M Angelopoulos and Christopher Soles and C Wang and Vivek Prabhu and P McGuiggan and Jack Douglas and Eric Lin and Wen-Li Wu and Sushil Satija},
  title = {Water Immersion of Model Photoresists: Interfacial Influences on Water Concentration and Surface Morphology},
  year = {2005},
  number = {4},
  month = {2005-02-01 00:02:00},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852338},
  language = {en},
}