@article{837226,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Ronald Jones and Eric Lin and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Combinatorial Methodologies Offer Potential for Rapid Research of Photo-resist Materials and Formulations},
  year = {2002},
  number = { 20(2)},
  month = {2002-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853816},
  language = {en},
}