@article{837211,
  author = {V. Lee and Christopher Soles and Hyun Ro and Daniel Hines and Ronald Jones and Eric Lin and Wen-Li Wu},
  title = {Nanoimprint Pattern Transfer Quality from Specular X-Ray Reflectivity},
  year = {2005},
  number = {87},
  month = {2005-12-01 00:12:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852501},
  language = {en},
}