@conference{837126,
  author = {J Ablett and Joseph Woicik and Zs Tokei},
  title = {Preliminary Hard X-ray Micro-spectroscopic investigations on Thin-Film Ta-and-W Based Diffusion Barriers for Copper Interconnect Technology},
  year = {2007},
  month = {2007-10-01 00:10:00},
  publisher = {Synchrotron Radiation Instrumentation: Ninth International Conference 879 , , 1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854334},
  language = {en},
}