@article{836851,
  author = {Yiping Liu and Wen-Li Wu and B Foran and D Gidley and Hae-Jeong Lee and Barry Bauer and B Vogt},
  title = {The Pore Structure and Its Impacts on Property and Performance of a Spin-on Porous Low k Dielectric},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Advanced Metalization Conference},
  language = {en},
}