@article{836781,
  author = {Daniel Josell and B Baker and C Witt and Daniel Wheeler and Thomas Moffat},
  title = {Via Filling by Electrodeposition: Superconformal Silver and Copper and Conformal Nickel},
  year = {2002},
  number = {149},
  month = {2002-10-24 00:10:00},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853133},
  language = {en},
}