@article{836696,
  author = {D Goldfarb and S Burns and M Angelopolous and S Skordas and R Burns and M Lawson and C Brodsky and V Vishnu and E Jablonski and Vivek Prabhu and Ronald Jones and B Vogt and Christopher Soles and Eric Lin and Wen-Li Wu},
  title = {Additive-Containing Rinses for LER and Defectivity Control During High-Resolution Resist Patterning},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  language = {en},
}