@article{836521, author = {William Egelhoff Jr. and P Chen and Cedric Powell and D Parks and F Serpa and Robert McMichael and D Martien and A. Berkowitz}, title = {Specular Electron Scattering in Metallic Thin Films}, year = {1999}, number = {17}, month = {1999-05-01 00:05:00}, publisher = {Journal of Vacuum Science and Technology B}, language = {en}, }