@article{836486,
  author = {Daniel Josell and S Kim and Daniel Wheeler and Thomas Moffat and S Pyo},
  title = {Interconnect Fabrication by Superconformal Iodine-Catalyzed Chemical Vapor},
  year = {2003},
  number = {150},
  month = {2003-04-03 00:04:00},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853177},
  language = {en},
}