@article{836471, author = {Charles Bouldin and William Wallace and G Lynn and S Roth and Wen-Li Wu}, title = {Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity}, year = {2000}, number = { 88(2)}, month = {2000-01-01 00:01:00}, publisher = {Japanese Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853677}, language = {en}, }