@article{836391,
  author = {Ravi Kummamuru and L Hu and Lawrence Cook and M Efremov and E Olson and Martin Green and L Allen},
  title = {Close Proximity Self-Aligned Shadow Mask for Sputter Deposition Onto a Membrane or Cavity},
  year = {2008},
  month = {2008-05-05 00:05:00},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}