@article{836056,
  author = {Ronald Jones and T Hu and Eric Lin and Wen-Li Wu and R Kolb and D Casa and P Bolton and Z Barclay},
  title = {Small Angle X-ray Scattering as a Tool for Sub-100 nm Pattern Characterization},
  year = {2003},
  number = { 83(19)},
  month = {2003-01-01 00:01:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853894},
  language = {en},
}