@conference{836021,
  author = {V. Lee and Christopher Soles and D Liu and Barry Bauer and Eric Lin and Wen-Li Wu},
  title = {Structural Characterization of Methylsilsesquioxane-Based Porous Low-k using X-ray Porosimetry},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {International Interconnect Technology Conference (IITC) Proceeding, Burlingame, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853912},
  language = {en},
}