@article{835961,
  author = {S Yang and C Pai and O Nalamasu and E Reichmanis and P Mirau and Yaw Obeng and J Seputro and Eric Lin and V. Lee},
  title = {Design of a Nanoporous Ultra Low-Dielectric Constant Organosilicate},
  year = {2001},
  number = {42(1)},
  month = {2001-01-01 00:01:00},
  publisher = {International Conference on Polymers in Electronic Packaging},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851922},
  language = {en},
}