@conference{835836,
  author = {M Wang and Eric Lin and Alamgir Karim and Michael Fasolka},
  title = {Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853895},
  language = {en},
}