@article{835831,
  author = {Shuhui Kang and B Vogt and Vivek Prabhu and Eric Lin and Wen-Li Wu and David VanderHart and Ashwin Rao and Karen Turnquest},
  title = {Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy},
  year = {2007},
  number = {40},
  month = {2007-02-09 00:02:00},
  publisher = {Macromolecules},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852648},
  language = {en},
}