@article{835586,
  author = {Daniel Josell and Daniel Wheeler and Thomas Moffat},
  title = {Superconformal Electrodeposition in Vias},
  year = {2002},
  number = {5},
  month = {2002-01-01 00:01:00},
  publisher = {Electrochemical and Solid State Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853111},
  language = {en},
}