@article{835461,
  author = {J Allain and M Nieto and M Hendricks and A Hassanein and Charles Tarrio and Steven Grantham and Vivek Bakshi},
  title = {Energetic and Thermal Sn Interactions and Their Effect on EUVL Source Collector Mirror Lifetime at High Temperatures},
  year = {2007},
  number = {6517},
  month = {2007-10-01 00:10:00},
  publisher = {SPIE},
  language = {en},
}