@article{835341,
  author = {Daniel Josell and Daniel Wheeler and C Witt and Thomas Moffat},
  title = {Seedless Superfill: Copper Electrodeposition in Trenches with Ruthenium Barriers},
  year = {2003},
  number = {6},
  month = {2003-08-04 00:08:00},
  publisher = {Electrochemical and Solid State Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853255},
  language = {en},
}