@conference{835016,
  author = {D Chen and D DeWitt and Benjamin Tsai and Kenneth Kreider and William Kimes},
  title = {Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement},
  year = {2002},
  number = {2002},
  month = {2002-09-01 00:09:00},
  publisher = {Advanced Theramal Processing of Semiconductors, International Conference | 10th | | IEEE, Vancouver, 1, CA},
  language = {en},
}