@conference{834991,
  author = {Sasa Bajt and H Chapman and Nhan Nguyen and J Alameda and J Robinson and M Malinowski and E Gullikson and Andrew Aquila and Charles Tarrio and Steven Grantham},
  title = {Design and Performance of Capping Layers for EUV Multilayer Mirrors},
  year = {2003},
  number = {5037},
  month = {2003-06-01 00:06:00},
  publisher = {Emerging Lithographic Technologies, Conference | 7th | Emerging Lithographic Technologies VII | SPIE, Undefined},
  language = {en},
}