@article{834826,
  author = {S Grantham and Charles Tarrio and Thomas Lucatorto},
  title = {Accurate Reflectometry for Extreme-Ultraviolet Lithography at the National Institute of Standards and Technology},
  year = {2002},
  number = {20},
  month = {2002-12-01 00:12:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}