@article{833686,
  author = {Y Shen and Z Zhang and Benjamin Tsai and D DeWitt},
  title = {Bidirectional Reflectance Distribution Function of Rough Silicon Wafers},
  year = {2001},
  number = {22},
  month = {2001-07-01 00:07:00},
  publisher = {International Journal of Thermophysics},
  language = {en},
}