@article{832256,
  author = {C Cromer and Thomas Lucatorto and Thomas O'Brian and M Walhout},
  title = {Improved Dose Metrology in Optical Lithograph},
  year = {1996},
  number = {39},
  month = {1996-01-01 00:01:00},
  publisher = {Solid State Technology},
  language = {en},
}