@conference{831676,
  author = {Bernd Bodermann and Detleff Bergmann and Egbert Buhr and Wolfgang Haebler-Grohne and Harald Bosse and James Potzick and Ronald Dixson and Richard Quintanilha and Michael Stocker and Andras Vladar and Ndubuisi Orji},
  title = {Results of an international photomask linewidth comparison of NIST and PTB},
  year = {2009},
  number = {7488},
  month = {2009-10-09 00:10:00},
  publisher = {SPIE Proceedings Vol. 7488, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903776},
  language = {en},
}