@article{831596,
  author = {Shuhui Kang and Wen-Li Wu and Kwang-Woo Choi and Vivek Prabhu and Anuja De Silva and Christopher Ober},
  title = {Characterization of the photoacid diffusion length and reaction kinetics in EUV photoresists with IR spectroscopy},
  year = {2010},
  month = {2010-04-14 00:04:00},
  publisher = {Macromolecules},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904320},
  language = {en},
}